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Home >> NANO Technology

NANO Technology

Forty years ago, there was a need by both the scientific community and the military/aerospace companies for a manual adjusting mechanism to align and position test equipment with extremely high resolution over a large linear or angular range. This mechanism also had to have excellent long-term stability. Aerotech filled that need with a novel product – the patented Coarse and Fine Adjustment and Positioning Mechanism (US Pat. No. 3,727,471). This large range and high resolution device was well-accepted and used by all the leading research facilities. By incorporating this device, Aerotech developed products with a linear resolution of 25 nanometers over 50 millimeters of travel, and sub-arc-second angular resolution over a large angular range. They are still being used today.

In the ensuing years, positioning and aligning requirements continued to grow, demanding ever higher performance in accuracy, speed, and resolution. Aerotech responded with state-of-the-art technologies resulting in products with up to 1.5 meters of travel, submicron accuracy, and nanometer resolution. These products broke productivity barriers by combining high speed and precision positioning for maximized throughput.

Now the need arises again to create equipment that enables us to measure, manipulate, affect, and view nanometer structures over a large area. To achieve this goal, Aerotech has, once again, advanced the state-of-the-art in high precision motion control.

Check back often as we continue to expand this revolutionary line of positioning stages.

  Positioning - Linear

ANT95-L NanoTranslation, Cross-Roller Bearing
Linear Stage
ANT95-XY NanoTranslation, Two Axis,
Cross-Roller Bearing Linear Stage
Aerotech’s NanoTranslation (ANT95-L, ANT95-L-H) cross-roller stages combine speed, accuracy, resolution, repeatability, reliability, and compact size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series. Product improvements such as 5 g acceleration, 500 mm/s velocity, enhanced load capacity, and standardized, universal base mounting patterns allow the use of this flexible stage family in an even wider range of configurations than its predecessors.

Click here for complete product information.
The Aerotech NanoTranslation (ANT) cross-roller-bearing, linear motor, dual-axis stage is the newest release and continues the evolution of the ANT series of stages. The ANT95-XY and ANT95-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and two grades of accuracy.

Click here for complete product information.

5 nm Best-In-Class Resolution
linear tables

Minimum incremental motion for ANT95-L

5 nm Best-In-Class Resolution
linear tables

Minimum incremental motion for ANT95-XY

Max Travel
25 or 50 mm
Accuracy
±250 nanometers
Speed
500 mm/s
Load
7.0 kg
Max Travel
25 x 25 or 50 x 50 mm
Accuracy
±250 nanometers
Speed
500 mm/s
Load
6.0 kg
ANT130-L Cross-Roller Bearing Linear Stage  
 
The ANT130-L series stages offer best-in-class performance in speed, accuracy, resolution, repeatability, reliability, travel range, and are offered in two accuracy grades. With its low profile and outstanding performance characteristics, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Click here for complete product information.

 

5 nm Best-In-Class Resolution

Minimum incremental motion for ANT130-L

 
Max Travel
35, 60, 110, 160 mm
Accuracy
±250 nanometers
Speed
350 mm/s
Load
12.0 kg
 

 

   
   
   
 

  

 

 
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