Aerotech manufactures complete vacuum-compatible
motion systems for high-performance applications such as
Extreme Ultraviolet (EUV) Lithography, Scanning Electron
Microscopy (SEM), Ion Beam Profiling, and E-Beam
Inspection. Platforms are available in a wide variety of
multi-axis configurations to achieve the complex motions
you require. These systems include ultra-high accuracy
with nanometer-level in-position stability. Vacuum
preparation for 10^-8 torr (1.3 x 10^-8 mbar) is achieved by
incorporating vented hardware, vacuum compatible
lubrication, and special cabling. Custom systems can
achieve 10^-9 torr vacuum levels. Aerotech can provide
systems with partial pressure (outgassing) limits at
specific atomic mass units. Systems are RGA verification
tested. Aerotech also manufactures brushless linear and
rotary motors with tightly controlled magnetic fields that
can be liquid- or gas-cooled to improve thermal
management. Finally, special handling and cleaning
procedures along with careful material selection allow for
the lowest Total Mass Loss (TML) and Collected Volatile
Condensable Materials (CVCM) possible.